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| 1 | Thiru. Badrinath, I.A.S., | Commissioner | 07-02-1973 | 24-05-1975 |
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| 2 | Thiru. L. M. Vasagam, I.A.S., | Commissioner | 25-05-1975 | 08-07-1976 |
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| 3 | Thiru. M. K. Gomethagavelu, I.A.S., | Commissioner | 09-07-1976 | 10-12-1977 |
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| 4 | Thiru. A. N. Natarajan, I.A.S., | Commissioner | 11-12-1977 | 19-06-1978 |
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| 5 | Thiru. S. P. Elangovan, I.A.S., | Commissioner(I/c) | 20-06-1978 | 31-07-1978 |
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| 6 | Thiru. A. N. Natarajan, I.A.S., | Commissioner | 01-08-1978 | 15-12-1978 |
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| 7 | Thiru. S. P. Elangovan, I.A.S., | Commissioner(I/c) | 16-12-1978 | 14-02-1979 |
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| 8 | Thiru. K. Aludiapillai, I.A.S., | Commissioner(I/c) | 15-02-1979 | 14-03-1979 |
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| 9 | Thiru. A. N. Natarajan, I.A.S., | Commissioner | 15-03-1979 | 12-07-1979 |
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| 10 | Thiru. S. Jeyaraman, B.A., | Commissioner(I/c) | 13-07-1979 | 23-08-1979 |
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| 11 | Tmt. C. K. Gariyali, I.A.S., | Commissioner | 24-08-1979 | 14-10-1980 |
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| 12 | Thiru. M. Venkatachalam, I.A.S., | Commissioner | 15-10-1980 | 17-11-1982 |
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| 13 | Thiru. S. Rangamani, I.A.S., | Commissioner | 18-11-1982 | 29-05-1989 |
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| 14 | Tmt. V. Chandralekha, I.A.S., | Commissioner | 29-05-1989 | 24-03-1991 |
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| 15 | Thiru. A. Elangovan, I.A.S., | Director | 25-03-1991 | 02-11-1991 |
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| 16 | Thiru. M. Paramasivam, I.A.S., | Commissioner | 03-11-1991 | 04-05-1992 |
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| 17 | Tmt. V. Chandralekha, I.A.S., | Commissioner | 05-05-1992 | 09-07-1992 |
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| 18 | Thiru. M. Abul Hasan, I.A.S., | Commissioner(I/c) | 10-07-1992 | 26-07-1992 |
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| 19 | Thiru. T. R. Ramaswamy, I.A.S., | Director | 27-07-1992 | 25-01-1993 |
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| 20 | Thiru. K. Ganesan, I.A.S., | Director | 26-01-1993 | 23-08-1993 |
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| 21 | Thiru. M. Paramasivam, I.A.S., | Special Commissioner | 14-07-1993 | 31-03-1995 |
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| 22 | Thiru. R. Satpathy, I.A.S., | Commissioner(I/c) | 01-04-1995 | 26-04-1995 |
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| 23 | Tmt. S. Malathi, I.A.S., | Commissioner | 27-04-1995 | 21-05-1996 |
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| 24 | Tmt. C. K. Gariyali, I.A.S., | Special Commissioner | 22-05-1996 | 10-10-1997 |
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| 25 | Thiru. S. P. Elangovan, I.A.S., | Commissioner(I/c) | 20-10-1997 | 05-11-1997 |
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| 58 | Thiru. S. Raghupathi, I.A.S., | Director | 06-11-1997 | 06-12-1998 |
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| 26 | Thiru. K. Inbasagaran, I.A.S., | Special Commissioner | 07-12-1998 | 29-05-2001 |
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| 27 | Thiru. E. V. Manivannan, I.A.S., | Commissioner(I/c) | 30-05-2001 | 06-06-2001 |
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| 28 | Tmt. Girija Vaidyanathan, I.A.S., | Commissioner | 07-06-2001 | 09-12-2001 |
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| 29 | Thiru. J. T. Acharyalu, I.A.S., | Special Commissioner | 10-12-2001 | 11-06-2002 |
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| 30 | Thiru. N. Athimoolam, I.A.S., | Special Commissioner | 12-06-2002 | 31-08-2003 |
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| 31 | Tmt. Meenakshi Rajagopal, I.A.S., | Commissioner(I/c) | 01-09-2003 | 21-09-2003 |
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| 32 | Thiru. K. Sampathkumar, I.A.S., | Commissioner | 22-09-2003 | 18-06-2004 |
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| 33 | Thiru. Arun Ramanathan, I.A.S., | Special Commissioner | 19-08-2004 | 13-05-2005 |
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| 34 | Thiru. K. S. Sripathi, I.A.S., | Commissioner(I/c) | 01-06-2005 | 21-06-2005 |
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| 35 | Dr. M. A. Muthuveera Ganapathy | Commissioner(I/c) | 28-06-2005 | 20-07-2005 |
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| 36 | Thiru. Arun Ramanathan, I.A.S., | Special Commissioner | 21-07-2005 | 13-05-2006 |
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| 37 | Thiru. N. Narayanan, I.A.S., | Additional Chief Secretary Commissioner | 14-05-2006 | 31-07-2008 |
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| 38 | Thiru. V. K. Jayakodi, I.A.S., | Commissioner(I/c) | 01-08-2008 | 30-09-2008 |
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| 39 | Thiru. Ramesh Kumar Khanna, I.A.S., | Principal Secretary/Commissioner | 01-10-2008 | 07-03-2010 |
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| 40 | Thiru. G. A. Rajkumar, I.A.S., | Commissioner | 08-03-2010 | 11-06-2010 |
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| 41 | Thiru. K. Ganesan, I.A.S., | Commissioner(I/c) | 12-06-2010 | 16-05-2011 |
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| 42 | Thiru. K. Ashok Varthan Shetty, I.A.S., | Commissioner | 17-05-2011 | 09-12-2011 |
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| 43 | Tmt. J. Ambashankari, Joint Commissioner | Commissioner(FAC) | 27-01-2012 | 15-06-2014 |
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| 44 | Thiru. Chandra Parkash Singh, I.A.S., | Commissioner | 16-06-2014 | 30-06-2014 |
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| 45 | Thiru. M. A. Siddique., I.A.S., | Commissioner | 01-07-2014 | 07-08-2017 |
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| 46 | Thiru. S. Gopalakrishnan, I.A.S., | Commissioner | 07-08-2017 | 04-10-2017 |
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| 47 | Thiru. T. Anbalagan, I.A.S., | Director | 11-10-2017 | 01-03-2018 |
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| 48 | Tmt. R. Lilli, I.A.S., | Director(FAC) | 05-04-2018 | 10-04-2018 |
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| 49 | Tmt. Sandya Venugopal Sharma, I.A.S., | Commissioner | 11-04-2018 | 30-09-2018 |
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| 50 | Thiru. Santhosh K Misra, I.A.S., | Commissioner(FAC) | 29-10-2018 | 03-02-2019 |
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| 51 | Selvi. Apoorva, I.A.S., | Principal Secretary/Commissioner | 04-02-2019 | 28-01-2020 |
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| 52 | Thiru. Mangat Ram Sharma, I.A.S., | Principal Secretary/Commissioner | 07-02-2020 | 30-11-2020 |
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| 53 | Thiru. Rajesh Lakhoni, I.A.S., | Principal Secretary/Commissioner | 01-12-2020 | 16-05-2021 |
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| 54 | Selvi Apoorva, I.A.S., | Principal Secretary/Commissioner(I/c) | 17-05-2021 | 26-05-2021 |
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| 55 | Tmt. M.S. Sangeetha, I.A.S., | Commissioner(FAC) | 07-06-2021 | 15-06-2021 |
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| 56 | Thiru. Har Sahay Meena, I.A.S., | Principal Secretary/Commissioner | 16-06-2021 | 14-06-2022 |
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| 59 | Thiru. G. Prakash, I.A.S., | Commissioner | 15-06-2022 | 22-08-2023 |
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| 60 | Dr. R. Nantha Gopal, I.A.S., | Commissioner | 12-10-2023 | 31.05.2024 |